Adjustable exhaust flow for thermal uniformity

Details Adjustable exhaust flow for thermal uniformity Adjustable exhaust flow for thermal uniformity

2006-04-11

2006-04-11

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S444100, C219S443100, C219S448170, C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100

Reexamination Certificate

active

07026580

ABSTRACT:
A method and apparatus for adjusting exhaust flow, and the apparatus has a programmable exhaust control regulator generating a first input signal to a motor control circuit, an exhaust flow meter generating a second input signal to the motor control circuit and a motor driven control valve moved to different positions according to the first and second input signals, the control valve being installed in an exhaust portion of the hot plate apparatus.

REFERENCES:
patent: 6264706 (2001-07-01), Hirano
patent: 6380518 (2002-04-01), Shirakawa et al.
patent: 6403927 (2002-06-01), Kato
patent: 6554507 (2003-04-01), Namatsu

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