Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-04-11
2006-04-11
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S444100, C219S443100, C219S448170, C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100
Reexamination Certificate
active
07026580
ABSTRACT:
A method and apparatus for adjusting exhaust flow, and the apparatus has a programmable exhaust control regulator generating a first input signal to a motor control circuit, an exhaust flow meter generating a second input signal to the motor control circuit and a motor driven control valve moved to different positions according to the first and second input signals, the control valve being installed in an exhaust portion of the hot plate apparatus.
REFERENCES:
patent: 6264706 (2001-07-01), Hirano
patent: 6380518 (2002-04-01), Shirakawa et al.
patent: 6403927 (2002-06-01), Kato
patent: 6554507 (2003-04-01), Namatsu
Chen Ming-Fa
Kao Yao-Hwan
Lee Jia-Sheng
Lu De-Yuan
Duane Morris LLP
Fuqua Shawntina
Taiwan Semiconductor Manufacturing Co. Ltd.
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