4. Abrading
  5. Precision device or process - or with condition responsive...
  6. By optical sensor

Xinhui Wang

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Apparatus for detecting CMP endpoint in acidic slurries

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Asymmetric epitaxy and application thereof

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Endpoint detection in chemical-mechanical polishing of...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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FinFET with longitudinal stress in a channel

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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finFETS and methods of making same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2074886

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