Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Cantilevered microstructure
Folded spring based micro electromechanical (MEM) RF switch
Method for the fabrication of electrostatic microswitches
Method for the manufacture of IC-processed micro electro-static
Micro-electromechanical switch
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