Method for the manufacture of IC-processed micro electro-static

Details Method for the manufacture of IC-processed micro electro-static Method for the manufacture of IC-processed micro electro-static

1994-06-03

1996-04-23

Thomas, Tom

Fishing, trapping, and vermin destroying

437228, 437250, 310 40MM, H01L 21302

Patent

active

055102999

ABSTRACT:
A method for manufacturing a micro electro-static motor which is provided with a curved bearing structure for rotatably supporting the rotor of the micro electro-static motor in a line contact manner in order to reduce the frictional torque of the micromotor. The micro electro-static motor is also provided with four on-chip rotational speed detection devices to facilitate its rotational speed measurement and the closed-loop control of the rotational speed. The on-chip rotational speed detection devices are accomplished by forming four P-N junctions in a silicon substrate. The curved bearing structure can be accomplished by etching of a phosphosilicate glass/silicon oxide composite sacrificial layer to form a curved bearing opening due to the large difference of etch rates between the phosphosilicate glass and the silicon oxide in buffered HF and by forming a curved bearing in the curved bearing opening.

REFERENCES:
patent: 5093594 (1992-03-01), Mehregany
patent: 5191251 (1993-03-01), Paratte
patent: 5296775 (1994-03-01), Cronin et al.
patent: 5327033 (1994-07-01), Guckel et al.
patent: 5331236 (1994-07-01), Sexton
Howe et al., "Silicon Micromechanics: Sensors and Actuators on a Chip," IEEE Spectrum, Jul. 1990, pp. 29-35.

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