4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Wook Jun Nam

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Controlled nanowire growth in permanent, integrated...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Deposited thin films and their use in separation and...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Substrate dicing
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Fabrication of molecular scale devices using fluidic assembly

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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