4. Optical: systems and elements
  5. Having significant infrared or ultraviolet property
  6. Lens, lens system or component

Wolfgang Vollrath

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Apparatus and method for inspecting a semiconductor component

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Apparatus for measuring feature widths on masks for the...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Apparatus for measuring feature widths on masks for the...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Illumination device for a DUV microscope and DUV microscope

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Method for manufacturing ultraviolet microscope dry objectives a

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component
Patent

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Profile ID: LFUS-PAI-P-1142891

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