Method for manufacturing ultraviolet microscope dry objectives a

Optical: systems and elements – Having significant infrared or ultraviolet property – Lens – lens system or component

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359657, G02B 1314, G02B 1134

Patent

active

054404223

ABSTRACT:
A method for the manufacture of quasi-monochromatic microscope dry objectives for a wavelength range from 190 to 360 nanometers proceeds from a basic objective with a specified number of lenses. The basic objective is corrected for a specified wavelength with respect to image aberrations. By using lenses with slightly different production thicknesses and by arranging the lenses at different air separations, objectives for other areas of application are created. All of the objectives have the same number of lenses and virtually the same resolution. The data for three objectives derived from a basic objective are provided as an example.

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patent: 5103341 (1992-04-01), Ulrich et al.
patent: 5121255 (1992-06-01), Hayashi
patent: 5144475 (1992-09-01), Hayashi
patent: 5159492 (1992-10-01), Hayashi

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