Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-20
2008-05-20
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S077000
Reexamination Certificate
active
10711424
ABSTRACT:
An apparatus for measuring feature widths on masks1for the semiconductor industry is disclosed. The apparatus encompasses a carrier plate16that is retained in vibrationally decoupled fashion in a base frame14; a scanning stage18, arranged on the carrier plate16, that carries a mask1to be measured, the mask1defining a surface4; and an objective2arranged opposite the mask1. A liquid25is provided between the objective2and the surface4of the mask1.
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Brueck Hans-Jürgen
Hillmann Frank
Scheuring Gerd
Vollrath Wolfgang
Leica Microsystems Semiconductor GmbH
MueTec Automatisierta Mikroskopie und Messtechnik GmbH
Rutledge D.
Simpson & Simpson PLLC
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