4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Wolfgang Dettmann

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Mask with programmed defects and method for the fabrication...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method for inspection of periodic grating structures on...

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Set of at least two masks for the projection of structure...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Set of masks including a first mask and a second trimming...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Set of masks including a first mask and a second trimming...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2399141

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