Electric resistance heating devices – Heating devices – Vaporizer
Patent
1992-08-11
1993-06-01
Hearn, Brian E.
Electric resistance heating devices
Heating devices
Vaporizer
118726, 118724, C23C 1600
Patent
active
052167429
ABSTRACT:
A crucible (9) of a nonmetallic material with an elongated cavity (42) to contain the material to be evaporated has on top a vapor emission slot (45) which is defined at its longitudinal edges (43, 44) by two elongated plates (40, 41) of a likewise nonmetallic material. In the cavity (42) two heating rods (46, 47) are disposed in a mirror-symmetrical relationship to a plane of symmetry (S) through the vapor emission slot (45), one under each of the plates (40, 41) defining the vapor emission slot (45). Additional heating means are provided outside of the crucible and inside of a thermal barrier system.
REFERENCES:
patent: 2440135 (1948-04-01), Alexander
patent: 3984585 (1976-10-01), Onozaki et al.
patent: 4979468 (1990-12-01), Kleyer
IBM Technical Disclosure Bulletin, vol. 14, No. 9, Feb. 1972, p. 2548, "Evaporation Apparatus".
IBM Technical Disclosure Bulletin, vol. 4, No. 4, Sep. 1961, p. 4, "Evaporation Method and Apparatus".
Anderle Friedrich
Buschbeck Wolfgang
Feuerstein Albert
Krug Thomas
Sichmann Eggo
Baskin Jonathan D.
Hearn Brian E.
Leybold Aktiengesellschaft
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