Method for the evacuation of a low-vacuum chamber and of a HGH-v

Details Method for the evacuation of a low-vacuum chamber and of a HGH-v Method for the evacuation of a low-vacuum chamber and of a HGH-v

1992-08-26

1993-07-20

Gluck, Richard E.

Pumps

Processes

417 62, 417250, B01J 304, G01L 2100

Patent

active

052288382

ABSTRACT:
For the evacuation of a low-vacuum chamber (4) and of a high-vacuum chamber (5), two pump trains (6, 7) are provided, each consisting of a vacuum pump unit (8, 9) and a forepump unit (10, 11). The forepump unit (11) of the pump train (7) of the high-vacuum chamber (5) can draw selectively from the vacuum pump unit (9) of the high-vacuum chamber (5) or from a high-vacuum pump unit (12) connected likewise to the high-vacuum chamber (5). The vacuum pump unit (9) can aspirate either from the highvacuum chamber (5) or from the low-vacuum chamber (4) and discharge to the forepump unit (10) of pump train (6) or to the forepump unit (11) of pump train (7).

REFERENCES:
patent: 3536418 (1970-10-01), Breaux
patent: 3668393 (1972-06-01), Von Rauch
patent: 4850806 (1989-07-01), Morgan
patent: 5114316 (1992-05-01), Shimizu
Pirani et al., Principles of Vacuum Engineering Chapman & Hall (1961) pp. 2-3, 386-406.

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