Apparatus for the rapid evacuation of a vacuum chamber

Details Apparatus for the rapid evacuation of a vacuum chamber Apparatus for the rapid evacuation of a vacuum chamber

1996-07-02

1999-12-21

Izaguirre, Ismael

Pumps

With intercooler

417205, F04B 2308, F04C 2502

Patent

active

060041099

ABSTRACT:
A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).

REFERENCES:
patent: 2652188 (1953-09-01), Cyr
patent: 4505647 (1985-03-01), Alloca et al.
patent: 4850806 (1989-07-01), Morgan et al.
patent: 5039280 (1991-08-01), Saulgeot
patent: 5228838 (1993-07-01), Gebele et al.
patent: 5259735 (1993-11-01), Takahashi et al.
patent: 5595477 (1997-01-01), Amlinger
Fussel, "Trockenlanferde Vakuurmprempen in der Chemischen Industrie" Vakuum in der Praxis, No. 2, pp. 85-88.

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