Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
Corporate Assignee
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Balanced MEMS switch for next generation communication systems
Fabrication method for making a planar cantilever, low...
Head electrode region for a reliable metal-to-metal contact...
Head electrode region for a reliable metal-to-metal contact...
Microelectromechanical device having a common ground plane...
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