Wave transmission lines and networks – Automatically controlled systems – With control of equalizer and/or delay network
Reexamination Certificate
2006-01-13
2009-06-09
Mulpuri, Savitri (Department: 2812)
Wave transmission lines and networks
Automatically controlled systems
With control of equalizer and/or delay network
C333S262000
Reexamination Certificate
active
07545234
ABSTRACT:
The present invention relates to MEM switches. More specifically, the present invention relates to a system and method for making MEM switches having a common ground plane. One method for making MEM switches includes: patterning a common ground plane layer on a substrate; forming a dielectric layer on the common ground plane layer; depositing a DC electrode region through the dielectric layer to contact the common ground plane layer; and depositing a conducting layer on the DC electrode region so that regions of the conducting layer contact the DC electrode region, so that the common ground plane layer provides a common ground for the regions of the conducting layer.
REFERENCES:
patent: 5121089 (1992-06-01), Larson
patent: 5258591 (1993-11-01), Buck
patent: 5578976 (1996-11-01), Yao
patent: 5629565 (1997-05-01), Schlaak et al.
patent: 5638946 (1997-06-01), Zavracky
patent: 6046659 (2000-04-01), Loo et al.
patent: 6096149 (2000-08-01), Hetrick et al.
patent: 6331257 (2001-12-01), Loo et al.
patent: 6402969 (2002-06-01), Rodgers et al.
patent: 6404028 (2002-06-01), Hetrick et al.
patent: 6621392 (2003-09-01), Volant et al.
patent: 6667245 (2003-12-01), Loo et al.
patent: 6720267 (2004-04-01), Chen et al.
patent: 6800503 (2004-10-01), Kocis et al.
patent: 6803559 (2004-10-01), Hsu et al.
patent: 6842097 (2005-01-01), Hsu et al.
patent: 6861277 (2005-03-01), Monroe et al.
patent: 6951768 (2005-10-01), Kubena et al.
patent: 7026695 (2006-04-01), Yang et al.
patent: 7057251 (2006-06-01), Reid
patent: 2003/0054584 (2003-03-01), Hinzel et al.
patent: 2004/0188785 (2004-09-01), Cunningham et al.
patent: 2005/0130339 (2005-06-01), Zhang et al.
patent: 2005/0260792 (2005-11-01), Patel et al.
patent: 1 343 189 (2003-11-01), None
patent: 1 484 281 (2004-12-01), None
patent: WO 01/35433 (2001-05-01), None
Petersen, K.E. 1978, “Dynamic micromechanics on silison: techniques and devices.”
Petersen, K.E, “Forming the Contact Surface of Micromechanical Switches”, IBM J. Res. Develop., vol. 23, No. 4, Jul. 1979, pp. 376-385.
Daniel Hyman, Juan Lam, Brett Warneke, Adele Schmitz, T. Y. Hsu, Julia Brown, James Schaffner, Andy Walston, Robert Y. Loo, Mehran Mehregany, and Jae Lee, “Surface-micromachined RF MEMS switches on GaAs substrates,” International Journal of RF and Microwave CAE, vol. 9, No. 4, Jul. 1999, pp. 348-361.
Y. Wang, Z. Li, D. T. McCormick, and N. C. Tien, “A Low-voltage Lateral MEMS Switch with High RF Performance,” Journal of MicroElectroMechanical Systems (JMEMS), vol. 13, No. 6, Dec. 2004, pp. 902-911.
Yao, J.J., “RF MEMS from a device perspective”, Journal Micromechanics and Microengineering 10: R9-R38, 2000.
Zavracky, P.M., Majurndar, S., McGruer,N, 1997, Micromechanical switches fabricated using nickel surface micromachining, Journal of Microelectromechannical Systems 6(1): 3-9.
Mulpuri Savitri
Tope-Mckay & Associates
Wireless MEMS, Inc.
LandOfFree
Microelectromechanical device having a common ground plane... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microelectromechanical device having a common ground plane..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical device having a common ground plane... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4082814