Balanced MEMS switch for next generation communication systems

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

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Details

C200S181000

Reexamination Certificate

active

07466215

ABSTRACT:
A micro-electro-mechanical system (MEMS) switch is described. The MEMS switch includes both RF-input and output transmission lines formed on a substrate. An RF armature is anchored to the substrate and is electrically connected with the RF-output transmission line. A contact is electrically connected with the RF-input transmission line. Both bias-input and output signal lines are formed on the substrate. A bias armature is anchored to the substrate and is electrically connected with the bias-input signal line. A DC/RF isolation insulator connects the bias armature with the RF armature. When a charge is introduced to the bias-input signal line, the bias armature is forced toward the bias-output signal line, thereby forcing the RF armature to connect with the contact and form an electrical circuit between the RF-input transmission line and the RF-output transmission line.

REFERENCES:
patent: 6440767 (2002-08-01), Loo et al.
patent: 6624720 (2003-09-01), Allison et al.
patent: 6962832 (2005-11-01), Chou
patent: 7283023 (2007-10-01), Robert

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