4. Abrading
  5. Accessory
  6. Tool cleaner

William R. Bartlett

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Apparatus and method for conditioning a chemical mechanical poli

Abrading – Accessory – Tool cleaner
Patent

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Circumferentially oscillating carousel apparatus for sequentiall

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Circumferentially oscillating carousel apparatus for sequentiall

Abrading – Abrading process – Glass or stone abrading
Patent

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Circumferentially oscillating carousel apparatus for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Driving a carrier head in a wafer polishing system

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1305822

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