Abrading – Abrading process – Glass or stone abrading
Patent
1995-10-27
1999-09-14
Morgan, Eileen P.
Abrading
Abrading process
Glass or stone abrading
451285, 451287, 451289, B24B 700
Patent
active
059513730
ABSTRACT:
A polishing apparatus including a plurality of polishing pads on respective rotating platens. The polishing platens, and therefore the attached pads also, may be of substantially different diameters. Multiple wafer heads can simultaneously polish multiple wafers on the multiple polishing pads or at different positions on one of the pads. The wafer heads are suspended from a rotatable carousel, which provides positioning of the heads relative to the polishing surfaces. Additionally, a loading/unloading station is provided. The carousel selectively positions the heads on the polishing surfaces, or positions one of the heads over the loading/unloading station while the remaining heads are located over polishing stations for substrate polishing, at which positions the wafers can be polished. The carousel can rotate to sweep all wafer heads attached thereto over respective polishing pads that they overlie.
REFERENCES:
patent: 3142942 (1964-08-01), Celovsky
patent: 3292312 (1966-12-01), Snyder
patent: 3377750 (1968-04-01), Day
patent: 3505766 (1970-04-01), Boettcher et al.
patent: 3518798 (1970-07-01), Boettcher
patent: 3631634 (1972-01-01), Weber
patent: 3665648 (1972-05-01), Yamanaka
patent: 3731435 (1973-05-01), Boettcher et al.
patent: 3813825 (1974-06-01), Weber et al.
patent: 3857123 (1974-12-01), Walsh
patent: 3913271 (1975-10-01), Boettcher
patent: 4481741 (1984-11-01), Bouladon et al.
patent: 4583325 (1986-04-01), Tabuchi
patent: 5224304 (1993-07-01), Cesna
patent: 5333413 (1994-08-01), Hashimoto
patent: 5367545 (1994-11-01), Nakamura
patent: 5498199 (1996-03-01), Karlsrud et al.
Bartlett William R.
Shendon Norm
Applied Materials Inc.
Morgan Eileen P.
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