Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
Inventor
active
Directional CVD process with optimized etchback
Etching of hard masks
Formula-based run-to-run control
Fully-depleted SOI MOSFETs with low source and drain...
Low resistance T-gate MOSFET device using a damascene gate...
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Profile ID: LFUS-PAI-P-1156865