4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus

Wesley J. Skinner

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Enhanced etching/smoothing of dielectric surfaces

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Enhanced etching/smoothing of dielectric surfaces

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
Reexamination Certificate

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Formation of doped regions and/or ultra-shallow junctions in...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...
Reexamination Certificate

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Formation of ultra-shallow junctions by gas-cluster ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Formation of ultra-shallow junctions by gas-cluster ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2125376

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