4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Wei Ti Lee

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Aluminum contact integration on cobalt silicide junction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Aluminum sputtering while biasing wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Aluminum sputtering while biasing wafer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Ampoule splash guard apparatus

Gas and liquid contact apparatus – Contact devices – Liquid tank
Reexamination Certificate

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CVD-PVD deposition process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2190013

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