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Wei-Min Li

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Atomic layer deposition methods for forming a multi-layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Atomic layer deposition reactor

Coating apparatus – Gas or vapor deposition – With treating means
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Low resistivity metal carbonitride thin film deposition by...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Metal nitride carbide deposition by ALD

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
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Metal nitride deposition by ALD with reduction pulse

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
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Profile ID: LFUS-PAI-P-2264870

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