4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Walter Zygmunt

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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HDP-CVD deposition process for filling high aspect ratio gaps

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Hydrogen assisted undoped silicon oxide deposition process...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Hydrogen assisted undoped silicon oxide deposition process...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2011609

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