4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Walter Benjamin Glenn

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Apparatus for cyclical deposition of thin films

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Clamshell and small volume chamber with fixed substrate support

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
Reexamination Certificate

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Methods and apparatus for forming barrier layers in high...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods and apparatus for forming barrier layers in high...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods and apparatus for forming barrier layers in high...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2788806

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