4. Coating apparatus
  5. Program, cyclic, or time control
  6. Having prerecorded program medium

Vu Ngoc Tran Nguyen

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Hermetic cap layers formed on low-κ films by plasma...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Hermetic cap layers formed on low-k films by plasma enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method to reduce gas-phase reactions in a PECVD process with...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Structure and method for porous SiCOH dielectric layers and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2421620

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