4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Vidyut Gopal

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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Dry etch release of MEMS structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Microstructure devices, methods of forming a microstructure...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2162884

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