4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Housing or package
  6. With semiconductor element forming part

Vencent Chang

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Dummy vias for damascene process

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With semiconductor element forming part
Reexamination Certificate

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Immersion lithography process and mask layer structure...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Method for forming via-first dual damascene interconnect...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Method for planarizing barc layer in dual damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Sandwich photoresist structure in photolithographic process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2344528

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