4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Vasile Paraschiv

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Method for selective removal of high-k material

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Patterning of doped poly-silicon gates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Plasma composition for selective high-k etch

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2417667

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