4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Ion plating or implantation

Varian Semiconductor Equipment Associates Inc.

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Acceleration and analysis architecture for ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Acceleration and analysis architecture for ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Active electrostatic seal and electrostatic vacuum pump

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Active method and system of establishing electrical contact

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Adjustable conductance limiting aperture for ion implanters

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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