4. Coating processes
  5. Measuring, testing, or indicating

Ukyo Jeong

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In situ surface contamination removal for ion implanting

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implant beam angle integrity monitoring and adjusting

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Plasma implantation of deuterium for passivation of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Plasma implantation of deuterium for passivation of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Techniques for temperature controlled ion implantation

Coating processes – Measuring – testing – or indicating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2214194

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