4. Electric lamp or space discharge component or device manufacturi
  5. Process
  6. With assembly or disassembly

Tzu-Kun Ku

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CVD titanium silicide for contact hole plugs

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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CVD titanium silicide for contract hole plugs

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Insitu formation of TiSi.sub.2 /TiN bi-layer structures using se

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Insitu formation of TiSi2/TiN bi-layer structures using self-ali

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Insitu formation of TiSi2/TiN bi-layer structures using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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