4. Material or article handling
  5. Movable rack having superposed, charge-supporting elements,...
  6. Rack moved vertically by elevating means

Tutomu Hiroki

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Apparatus for detecting and aligning a substrate

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent

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Multi-chamber system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Vacuum processing apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Profile ID: LFUS-PAI-P-971901

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