4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

Tsunehiro Nishi

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Acetal compound, polymer, resist composition and patterning...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Acetal compound, polymer, resist composition and patterning...

Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
Reexamination Certificate

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Acid-decomposable ester compound suitable for use in resist...

Organic compounds -- part of the class 532-570 series – Organic compounds – Cyclopentanohydrophenanthrene ring system containing
Reexamination Certificate

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Bisphenol carboxylic acid tertiary ester derivatives and chemica

Organic compounds -- part of the class 532-570 series – Organic compounds – Carboxylic acid esters
Patent

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Carboxyl-containing lactone compound, polymer, resist...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-749190

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