Bisphenol carboxylic acid tertiary ester derivatives and chemica

Details Bisphenol carboxylic acid tertiary ester derivatives and chemica Bisphenol carboxylic acid tertiary ester derivatives and chemica

1996-09-17

1999-01-05

Killos, Paul J.

Organic compounds -- part of the class 532-570 series

Organic compounds

Carboxylic acid esters

4302701, C07C 6976

Patent

active

058565612

ABSTRACT:
Novel bisphenol carboxylic acid tertiary ester derivatives having two aromatic ether groups and an ester group which are all replaced by acid labile groups are provided. The derivatives are used as a dissolution inhibitor in a chemically amplified positive resist composition comprising an organic solvent, an alkali soluble resin, and a photo-acid generator. Since the dissolution inhibitor has a highly reactive acetal group as an acid labile group, its coupling-off rapidly takes place after exposure. The dissolution inhibitor itself is less alkali soluble and its acid decomposition product is a phenol derivative having a carboxylic acid group with high alkali solubility, leading to a high dissolution contrast.

REFERENCES:
Chem. Abst. CA 123:9157 Mar. 14, 1995.
Chem Abst. CA 122:105438 Oct. 11, 1994.

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