4. Coating apparatus
  5. Gas or vapor deposition

Troy Kim

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Boron diffusion barrier by nitrogen incorporation in spacer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Cleaning of CVD chambers using remote source with cxfyoz...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
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Heated gas distribution plate for a processing chamber

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-2843619

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