4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Toshimasa Kisa

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Downstream microwave plasma processing apparatus having an impro

Electric heating – Metal heating – By arc
Patent

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Microwave plasma processing process and apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Microwave plasma processing process and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Plasma processor and method for IC fabrication

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-1231936

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