4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Toshiba Kikai Kabushikikaisha

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High-speed rotational vapor deposition apparatus and high-speed

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus and method for forming thin film

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vapor deposition apparatus and vapor deposition method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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