4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Tomonobu Noda

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Manufacturing process evaluation method for semiconductor...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Method of evaluating critical locations on a semiconductor...

Optics: measuring and testing – Position or displacement
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Semiconductor substrate, substrate inspection method,...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
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Semiconductor substrate, substrate inspection method,...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Simulated defective wafer and pattern defect inspection...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-2168192

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