4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. With means to treat gas or vapor

Tomohito Komatsu

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Heater for manufacturing semiconductor

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent

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Substrate stage mechanism and substrate processing apparatus

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Substrate-placing mechanism having substrate-heating function

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate

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Trapping device, processing system, and method removing...

Gas separation: processes – Heat exchanging
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3081728

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