4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Tomohiro Iijima

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Beam dose computing method and writing method and record...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
Reexamination Certificate

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Charged beam lithography system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle beam writing apparatus and method thereof,...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Charged particle beam writing method and apparatus and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Pattern area value calculating method, proximity effect...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-2127121

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