4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Tokyo Electron Sagami Kabushiki Kaisha

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Forced cooling apparatus for heat treatment apparatus

Heating – With work cooling structure
Patent

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Forced cooling apparatus for heat treatment apparatus

Heating – Processes of heating or heater operation – Including preparing or arranging work for heating
Patent

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Forced cooling apparatus for heat treatment apparatus

Heating – With work cooling structure
Patent

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Heat treatment apparatus

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
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Heat treatment apparatus utilizing flat heating elements for tre

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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