Heating – With work cooling structure
Patent
1994-08-09
1996-06-11
Bennet, Henry A.
Heating
With work cooling structure
432 5, 432 6, 432241, 432 11, 432152, 432 83, F27D 1502
Patent
active
055250572
ABSTRACT:
A forced cooling apparatus for a heat treatment apparatus comprising a heat treatment furnace having a process tube with one end open at an furnace opening and another end closed at an furnace top portion; and a heater portion which covers the process tube, and wherein cooling of the heat treatment furnace is performed by forced cooling by flowing air into a gap formed between the heater portion and the process tube and which extends to the furnace top portion. The forced cooling apparatus comprises a plural number of air intake openings provided at the furnace opening portion for flowing air from an open end of the process tube and into the gap, an exhaust opening provided at the furnace top portion for flowing air which has flowed into the gap, from the vicinity of a middle portion on a side of a closed end of the process tube to outside the heater portion, an exhaust means connected to the exhaust opening, a shutter means for closing the air intake openings, and a shutter means for closing the exhaust opening. This configuration allows the air inside the furnace to be naturally exhausted from the exhaust opening to outside of the furnace, and allows uniform forced cooling of the heat treatment apparatus.
Bennet Henry A.
Ohri Siddharth
Tokyo Electron Sagami Kabushiki Kaisha
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