Heat treatment apparatus

Details Heat treatment apparatus Heat treatment apparatus

1992-05-22

1993-12-28

Yuen, Henry C.

Heating

Work feeding, agitating, discharging or conveying...

Removable furnace bottom section or kiln cart

432 2, 432152, 432253, F27D 500, F27B 900

Patent

active

052734234

ABSTRACT:
A heat treatment apparatus includes a process tube for heat treatment of an object to be heat treated, and a load lock chamber linked to the process tube and for housing the object to be heat treated and maintaining either a vacuum or maintaining an arbitrary inert gas atmosphere, and with the load lock chamber being provided with an elevator for raising the object to be heat treated on a loading mechanism and into the process tube, and a nozzle unit provided with a plural number of gas emission openings in an inner wall of the load lock chamber on a side opposing the elevator, and to uniformly emit gas to the object to be heat treated and which is on the loading mechanism. By such a configuration, it is possible to emit gas uniformly to the object for heat treatment and which is on the loading mechanism for the object for heat treatment.

REFERENCES:
patent: 2988980 (1961-06-01), Tschudin
patent: 4610628 (1986-09-01), Mizushina
patent: 4876949 (1989-10-01), Fairchild et al.
patent: 4949262 (1990-05-01), Balon, Jr. et al.
patent: 5118286 (1992-06-01), Sarin

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