4. Semiconductor device manufacturing: process
  5. Making passive device

Todd M.C. Li, Esq.

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Alternating phase mask built by additive film deposition

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Collar formation using selective SiGe/Si etch

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Embedded silicon germanium using a double buried oxide...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch
Reexamination Certificate

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In situ doped embedded sige extension and source/drain for...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Reexamination Certificate

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Low k dielectric CVD film formation process with in-situ...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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