4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Altering etchability of substrate region by compositional or...

Todd C. Bailey

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Device for holding a template for use in imprint lithography

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only
Reexamination Certificate

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Imprint lithography system to produce light to impinge upon...

Plastic article or earthenware shaping or treating: apparatus – Means applying electrical or wave energy directly to work – Radiated energy
Reexamination Certificate

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Imprint lithography template having a feature size under 250 nm

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only
Reexamination Certificate

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Mask forming and implanting methods using implant stopping...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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Method for performing chemical shrink process over BARC...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2330011

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