Device for holding a template for use in imprint lithography

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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Details

C101S028000, C355S075000, C977S887000

Reexamination Certificate

active

08033814

ABSTRACT:
An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.

REFERENCES:
patent: 4472124 (1984-09-01), Kashihara et al.
patent: 4551192 (1985-11-01), Di Milia et al.
patent: 4897228 (1990-01-01), Miwa et al.
patent: 5194743 (1993-03-01), Aoyama et al.
patent: 5324012 (1994-06-01), Aoyama et al.
patent: 5344304 (1994-09-01), Tamura et al.
patent: 5515167 (1996-05-01), Ledger et al.
patent: 5632936 (1997-05-01), Su et al.
patent: 5716742 (1998-02-01), Doran
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6036568 (2000-03-01), Murouchi et al.
patent: 6101267 (2000-08-01), Shiraishi
patent: 6217901 (2001-04-01), Perrott et al.
patent: 6482742 (2002-11-01), Chou
patent: 6517977 (2003-02-01), Resnick et al.
patent: 6518189 (2003-02-01), Chou
patent: 6597434 (2003-07-01), Van Dijsseldonk
patent: 6696220 (2004-02-01), Bailey et al.
patent: 6747732 (2004-06-01), Lee
patent: 7298456 (2007-11-01), Cherala et al.
patent: 2002/0132482 (2002-09-01), Chou
patent: 2002/0150398 (2002-10-01), Choi et al.
patent: 2002/0185759 (2002-12-01), Gorczyca et al.
patent: 2004/0124566 (2004-07-01), Sreenivasan et al.
patent: 2004/0168588 (2004-09-01), Choi et al.
patent: 2004/0169441 (2004-09-01), Choi et al.
patent: 2004/0223131 (2004-11-01), Choi et al.
patent: 2004/0251775 (2004-12-01), Choi et al.
patent: 2005/0089774 (2005-04-01), Choi et al.
patent: 2005/0263077 (2005-12-01), GanapathiSubramanian et al.
patent: 2007/0284776 (2007-12-01), Hisada et al.

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