Imprint lithography template having a feature size under 250 nm

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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C977S887000

Reexamination Certificate

active

10755997

ABSTRACT:
The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality of recessions being less than 250 nm.

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