4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With registration indicia

Timothy Allan Brunner

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Asymmetrical resist sidewall

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Asymmetrical resist sidewall

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent

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Critical dimension control of printed features using...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method of optical metrology of unresolved pattern arrays

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Plasma resistant composition and use thereof

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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