Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
Inventor
active
Antimony and germanium complexes useful for CVD/ALD of metal...
Antimony and germanium complexes useful for CVD/ALD of metal...
Composition and method for low temperature chemical vapor...
Copper precursors for CVD/ALD/digital CVD of copper metal films
Precursor compositions for atomic layer deposition and...
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