4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

Thomas Steinhausler

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Hydroxy-amino thermally cured undercoat for 193 NM lithography

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate

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Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithog

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Molding compositions having improved properties

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Reexamination Certificate

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Radiation sensitive terpolymer, photoresist compositions thereof

Radiation imagery chemistry: process – composition – or product th – Imaged product – Including resin or synthetic polymer
Patent

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Thermally cured underlayer for lithographic application

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1156254

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