Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithog

Details Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithog Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithog

1999-03-12

2000-04-25

Baxter, Janet

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

4302701, 4302721, 430910, G03C 176

Patent

active

060542489

ABSTRACT:
The present invention is directed to a thermally curable polymer composition comprising a hydroxyl-containing polymer and a polyfunctional isocyanate as a crosslinking agent, which is particularly useful in photolithographic coating of substrates. The thermally curable polymer composition may be dissolved in a solvent and used as an undercoat layer in deep UV lithography. Furthermore, the present invention further relates to a process for using the photolithographic coated substrate for the production of relief structures.

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